Essays about: "Biaxial alignment"

Found 1 essay containing the words Biaxial alignment.

  1. 1. Biaxial alignment in off-normally deposited films using highly ionized fluxes

    University essay from Institutionen för fysik, kemi och biologi; Tekniska högskolan

    Author : Tsung-Han Wu; [2013]
    Keywords : Biaxial alignment; biaxial texture; out-of-plane orientation; in-plane orientation; HiPIMS; HPPMS; Chromium;

    Abstract : The influence of highly ionized fluxes on the biaxial alignment in thin films has been investigated by studying the relation between the effect of ionization degrees and different process conditions, including magnetron position, working pressure and substrate bias voltage. In this thesis work, SEM and XRD techniques were employed to study the morphology and crystallographic properties of Cr films grown by High Power Impulse Magnetron Sputtering (HiPIMS) and Direct Current Magnetron Sputtering (DCMS) on Si substrate with a native SiO2 layer. READ MORE