Off-State Stress Effects in AlGaN/GaN HEMTs : Investigation of high-voltage off-state stress impact on performance of and its retention in hybrid-drain ohmic gate AlGaN/GaN HEMTs

Abstract: High electron mobility transistors (HEMTs) realized using AlxGa1-xN/GaN are relatively new technology which is prominent for high-speed and high-power applications. Some of the main problems with this technology were identified as dynamic RDSon, current collapse and threshold voltage instabilities due to the off-state stress. What was less investigated is the effect of the off-state stress on the leakage current at lower voltages. In this work, multiple devices with various initial leakage currents are stressed at different stress conditions (drain voltage, temperature, duration) and the development of drain-source on-state resistance (RDSon), threshold voltage (Vth) and drain-source leakage current (IDSS) after stress are tracked. It was found out that devices with initially higher leakage exhibit higher RDSon and Vth before stress, which simulations attributed to the higher Al mole fraction in the back-barrier or less unintentional doping in the channel layer. During the off-state stress (VDS = 900 V), the leakage current shortly rises and then sharply drops, presumably because of the charge redistribution in the back-barrier. After the stress, no larger changes were observed for RDSon and Vth , but they were for the leakage current i.e., initially low leakage devices had post-stress leakage increase, while initially high leakage devices had post-stress leakage decrease. This is assumed to be caused by the charge redistribution. Parasitic capacitance measurements showed the rise of the pre-stress input, output and reverse transfer capacitances with the pre-stress leakage, which could presumably be explained by higher Al mole fraction inducing more charges in the channel layer, deeming higher Al mole fraction in the back-barrier as a main assumed cause for all the observed effects. After the stress, capacitance changes were tentatively explained by the charge redistribution in the back-barrier. Finally, high temperature was shown to significantly reduce the observed long time to recovery. However, more measurements are needed to further observe this influence. Additionally, more experiments (e.g., on wafer, G-ω measurement, etc.) are needed in general to further investigate the mechanisms behind these memory effects.