Numerical calculations of optical structures using FEM

Abstract: Complex surface structures in nature often have remarkable optical properties. By understanding the origin of these properties, such structures may be utilized in metamaterials, giving possibilities to create materials with new specific optical properties. To simplify the optical analysis of these naturally developed surface structures there is a need to assist data analysis and analytical calculations with numerical calculations. In this work an application tool for numerical calculations of optical properties of surface structures, such as reflectances and ellipsometric angles, has been developed based on finite element methods (FEM). The data obtained from the application tool has been verified by comparison to analytical expressions in a thorough way, starting with reflection from the simplest of interfaces stepwise increasing the complexity of the surfaces. The application tool were developed within the electromagnetic module of Comsol Multiphysics and used the script language to perform post-process calculations on the obtained electromagnetic fields. The data obtained from this application tool are given in such way that easily allows for comparison with data received from spectroscopic ellipsometry measurements.