Essays about: "Atieh Zamani"

Found 1 essay containing the words Atieh Zamani.

  1. 1. Antimony implanted strained Si for nMOSFET applications

    University essay from

    Author : Atieh Zamani; [2009]
    Keywords : ;

    Abstract : Incorporation of implanted antimony (Sb) in strained-silicon (s-Si) formed on relaxed-SiGe virtual substrates (10 and 30% Ge) has been studied. The implantation doses were 5×1013- 5×1014 cm-2 with an energy of 20 keV. The activation of dopant was performed by an rapid thermal annealing (RTA) treatment at 700 and 800 °C for 30 sec. READ MORE