Essays about: "Chemlox"

Found 1 essay containing the word Chemlox.

  1. 1. InP/Si Template for Photonic Application

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Niklas Larsson; [2015]
    Keywords : CELOG; CMP; Chemlox; Citric Acid; Sodium Hypochlorite; InP; CELOG; CMP; Chemlox; Citronsyra; Natrium Hypoklorit; InP;

    Abstract : In this work an epitaxial layer of Indium Phosphide (InP) has been grown on top of a silicon substrate using the Corrugated Epitaxial Lateral Overgrowth (CELOG) technique. The grown InP CELOG top layer typically has a poor surface roughness and planarity. Before this surface can be used for any processing it has to be smooth and planarized. READ MORE