Essays about: "Electrostaitc force modeling"

Found 1 essay containing the words Electrostaitc force modeling.

  1. 1. Electrostatic Feedback for Mems Sensor : Development of in situ TEM instrumentation

    University essay from Institutionen för fysik, kemi och biologi

    Author : Huai-Ning Chang; [2008]
    Keywords : Electrostaitc force modeling; Force feedback; Force sensor;

    Abstract : This thesis work is about further developing an existing capacitive MEMS sensor for in situ TEM nanoindentation developed by Nanofactory Instrument AB. Today, this sensor uses a parallel plate capacitor suspended by springs to measure the applied force. The forces are in the micro Newton range. READ MORE