Essays about: "Fluorine Etching"

Found 2 essays containing the words Fluorine Etching.

1. 1. Inductively-Coupled Plasma Etching for Nanoimprint Si-masters

   University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Author : Oskar Boström; [2019]
   Keywords : NIL; Semiconductor; EBL; SEM; ICP-RIE; Fluorine Etching; Physics; Technology and Engineering;

   Abstract : In the last decades, engineers have been pushing semiconductor technology towards fabricating ever smaller devices, and will eventually pass the lower limit of currently commonplace optical lithographic techniques. New techniques have been developed, such as nanoimprint lithography. READ MORE

3. 2. Alternative method for deposition of alumina thin films

   University essay from Institutionen för fysik, kemi och biologi

   Author : Daniel Magnfält; [2009]
   Keywords : alumina; RF-sputtering; hydrogen; fluorine; amorphous alumina; aluminiumoxid; RF-sputtering; väte; fluor; amorft aluminumoxid;

   Abstract : Deposition of alumina thin films in the presence of fluorine as a method for reducing thehydrogen incorporation in the films was investigated in this thesis. Hydrogen incorporated in alumina thin films have been shown to cause a lower density and refractive index in amorphous films, assist electrical conduction through thin amorphous films as well as inhibiting the formation of the thermally stable α-phase. READ MORE