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Found 2 essays matching the above criteria.

1. 1. Growth and Characterization of Ferroelectric Lanthanum-Doped Hafnia

   University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Author : Harald Havir; [2020]
   Keywords : Ferroelectricity; Lanthanum-doped Hafnia; ALD; Science General;

   Abstract : Hafnia-based ferroelectrics show great promise as future nonvolatile memory devices, however, their issues regarding device inconsistency across their lifetime, coupled with the relatively short total lifetime, makes these devices only theoretical as of now. In this thesis, an ALD deposition recipe for lanthanum oxide deposition was created. READ MORE

3. 2. Reactive Ion Etching of Silicon using F-based chemistry - Exploring the Limits

   University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Author : Harald Havir; [2018]
   Keywords : Reactive Ion Etching; Plasma Etching; CHF3; SF6; High Anisotropy; Physics and Astronomy;

   Abstract : Dry Etching is widely used in nanoprocessing as a method of pattern transfer onto a hard substrate, like silicon. Improving the resolution of this etch process is an important step in reducing the feature size in, for instance, computer microchips, or Nanoimprint Lithography stamps. READ MORE