Essays about: "Nai-Yuan Ku"

Found 1 essay containing the words Nai-Yuan Ku.

  1. 1. Thermal Stability of Zr-Si-N Nanocomposite Hard Thin Films

    University essay from Nanostrukturerade material

    Author : Nai-Yuan Ku; [2010]
    Keywords : Zr-Si-N films; Nanocomposite hard coatings; Nanostructure; Magnetron sputtering; Hardness; Mechanical property; Thermal stability; Annealing; Transmission electron microscopy; X-ray diffraction; Nanoindentation; Elastic recoil detection analysis;

    Abstract : Mechanical property and thermal stability of Zr-Si-N films of varying silicon contents deposited on Al2O3 (0001) substrates are characterized. All films provided for characterization were deposited by reactive DC magnetron sputter deposition technique from elemental Zr and Si targets in a N2/Ar plasma at 800 oC. READ MORE