Essays about: "Oskar Boström"
Found 1 essay containing the words Oskar Boström.
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1. Inductively-Coupled Plasma Etching for Nanoimprint Si-masters
University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenAbstract : In the last decades, engineers have been pushing semiconductor technology towards fabricating ever smaller devices, and will eventually pass the lower limit of currently commonplace optical lithographic techniques. New techniques have been developed, such as nanoimprint lithography. READ MORE
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