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1. 1. Electrically Modified Quartz Crystal Microbalance to Study Surface Chemistry Using Plasma Electrons as Reducing Agents

   University essay from Linköpings universitet/Kemi

   Author : Pentti Niiranen; [2021]
   Keywords : Plasma enhanced chemical vapor deposition; PECVD; Quartz crystal microbalance; QCM;

   Abstract : Metallic films are important in various applications, such as electric devices where it can act as contacts. In electrical devices, the substrate typically consists of silicon dioxide (SiO2) which is a temperature-sensitive substrate. READ MORE