Essays about: "Plasma Etching"

Showing result 1 - 5 of 8 essays containing the words Plasma Etching.

  1. 1. Inductively-Coupled Plasma Etching for Nanoimprint Si-masters

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Oskar Boström; [2019]
    Keywords : NIL; Semiconductor; EBL; SEM; ICP-RIE; Fluorine Etching; Physics; Technology and Engineering;

    Abstract : In the last decades, engineers have been pushing semiconductor technology towards fabricating ever smaller devices, and will eventually pass the lower limit of currently commonplace optical lithographic techniques. New techniques have been developed, such as nanoimprint lithography. READ MORE

  2. 2. Reactive Ion Etching of Silicon using F-based chemistry - Exploring the Limits

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Harald Havir; [2018]
    Keywords : Reactive Ion Etching; Plasma Etching; CHF3; SF6; High Anisotropy; Physics and Astronomy;

    Abstract : Dry Etching is widely used in nanoprocessing as a method of pattern transfer onto a hard substrate, like silicon. Improving the resolution of this etch process is an important step in reducing the feature size in, for instance, computer microchips, or Nanoimprint Lithography stamps. READ MORE

  3. 3. Rear side BSF/emitter patterning of SHJ-IBC solar cells using selective deposition and hydrogen plasma etching of a-Si:H

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Mahmudul Hasan; [2016]
    Keywords : ;

    Abstract : Silicon heterojunction interdigitated back-contact (SHJ-IBC) solar cells have attracted considerable attention because of their potential to achieve very highly efficiency. However, the back contacting scheme leads to additional fabrication complexity mainly resulting from the formation of interdigitated n- (back surface field (BSF)) and p-type (emitter) hydrogenated amorphous silicon (aSi:H) strips. READ MORE

  4. 4. Development of All Dry Nanoimprint Lift-Off Process for Growth of Nanowires

    University essay from Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysik

    Author : Yasna Aberi; [2014]
    Keywords : Physics and Astronomy;

    Abstract : In this project, nanoimprint lithography has been applied to define gold particles on the surface of an InP wafer. For achieving this aim, a dry etching process has been developed to create resist undercut for the lift-off. READ MORE

  5. 5. Optical Properties of Silicon Nanopillar Arrays for Biosensing

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Inese Krasovska; [2014]
    Keywords : ;

    Abstract : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. READ MORE