Essays about: "Reactive Ion Etching"

Showing result 1 - 5 of 8 essays containing the words Reactive Ion Etching.

  1. 1. Inductively-Coupled Plasma Etching for Nanoimprint Si-masters

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Oskar Boström; [2019]
    Keywords : NIL; Semiconductor; EBL; SEM; ICP-RIE; Fluorine Etching; Physics; Technology and Engineering;

    Abstract : In the last decades, engineers have been pushing semiconductor technology towards fabricating ever smaller devices, and will eventually pass the lower limit of currently commonplace optical lithographic techniques. New techniques have been developed, such as nanoimprint lithography. READ MORE

  2. 2. Reactive Ion Etching of Silicon using F-based chemistry - Exploring the Limits

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Harald Havir; [2018]
    Keywords : Reactive Ion Etching; Plasma Etching; CHF3; SF6; High Anisotropy; Physics and Astronomy;

    Abstract : Dry Etching is widely used in nanoprocessing as a method of pattern transfer onto a hard substrate, like silicon. Improving the resolution of this etch process is an important step in reducing the feature size in, for instance, computer microchips, or Nanoimprint Lithography stamps. READ MORE

  3. 3. Evaluation of Atomic Layer Etching Possibility at Lund Nano Lab

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Md Sabbir Ahmed Khan; [2016]
    Keywords : Atomic Layer Etching; Nanoimprint lithography; Nanowires; Physics and Astronomy;

    Abstract : In modern electronics, device downscaling demands atomic precision control and Atomic Layer Etching (ALE) can provide this prime capability with minute device damage. ALE, also known as layer-by-layer etching, is a technique of removing atomically thin layers from the surface of materials in a controlled way. READ MORE

  4. 4. Optical Properties of Silicon Nanopillar Arrays for Biosensing

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Inese Krasovska; [2014]
    Keywords : ;

    Abstract : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. READ MORE

  5. 5. Identification of process induced defects affecting the performance of nanowire based solar cells by spatially resolved photocurrent measurements

    University essay from Lunds universitet/Fasta tillståndets fysik

    Author : Calvin Kan; [2013]
    Keywords : Nanowires; solar cells; nanotechnology; sustainable development; photocurrent measurements; energy; Technology and Engineering;

    Abstract : Solar power clearly has one of the greatest potential among renewable energy but a big setback is that it is still relatively expensive. Engineering of materials on a nanoscale, e.g. READ MORE