Essays about: "Teodor Qvint"

Found 1 essay containing the words Teodor Qvint.

  1. 1. Analysis of condition for ALD deposition of ferroelectric HZO

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : Teodor Qvint; [2022]
    Keywords : HZO; Ferro; ALD; Temperature; Purge time; Technology and Engineering;

    Abstract : Deposition of ferroelectric hafnium zirconium oxide (HZO) on semiconductor samples with Atomic Layer Deposition (ALD) has proven to be a viable method of production. But while the physical processes of ALD deposition is relatively well know, there exists some gaps in knowledge about different parameters for the ALD and the resulting depositions. READ MORE