Essays about: "atomic layer deposition"

Showing result 1 - 5 of 38 essays containing the words atomic layer deposition.

  1. 1. (1,3-di-tert-butyltriazenide) Cu(I) as vapor deposition precursor

    University essay from Linköpings universitet/Kemi

    Author : Peggy Bagherzadeh; [2023]
    Keywords : Vapor deposition; CVD; ALD; triazenide;

    Abstract : In the past few decades, devices such as computers have become smaller, and their performance has improved beyond comparison. Semiconductors and interconnectors are used in almost all devices today and are made of thin films. READ MORE

  2. 2. Linking the selectivity of varying surface phases of a real palladium catalyst toward specific methane oxidation pathways with Ambient Pressure X-ray Photoelectron Spectroscopy

    University essay from Lunds universitet/Synkrotronljusfysik; Lunds universitet/Fysiska institutionen

    Author : Ulrike Küst; [2023]
    Keywords : APXPS; catalysis; palladium; methane; Physics and Astronomy;

    Abstract : The study of heterogeneous catalysis, especially within methane oxidation, is of high importance in order to more efficiently remove unburned methane from bio-fuel exhausts. This is relevant as bio-fuel engines will replace those driven by fossil fuels in the coming decades. READ MORE

  3. 3. Semiconducting TiO2 for High Performance Ferroelectric Tunnel Junctions

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : Erik Wikare; [2022]
    Keywords : Technology and Engineering;

    Abstract : The ferroelectric tunnel junction FTJ is a rather old concept but has recently been in the spotlight for its promising properties in computer memory technology and neuromorphic computing. The device consists of a ferroelectric insulator sandwiched between two electrodes, and by polarisation switching the resistance along the heterostructure can drastically be adjusted. READ MORE

  4. 4. BCP Lithography Defined Arrays of InAs NWs Grown Using MOVPE with Au Seeds

    University essay from Lunds universitet/Lunds Tekniska Högskola; Lunds universitet/Fasta tillståndets fysik

    Author : Björn Landeke-Wilsmark; [2022]
    Keywords : Physics and Astronomy;

    Abstract : In this report we outline a detailed process flow for a quick and inexpensive implementation of large dense arrays of InAs nanowires (NWs) grown in the reactive ion etching/etched (RIE) pores of a SiO2/SiNx mask on top of an InAs/Si(111) substrate. The self-assembled (hexagonally close-packed) pattern of poly(methyl-methacrylate) (PMMA) cylinders in a poly(styrene) (PS) matrix adopted by a linear diblock poly(styrene-block-methyl-methacrylate) P(S-b-MMA) block-copolymer (BCP) was transferred to the dielectric stack (consisting of a ≈10 nm plasma enhanced chemical vapour deposition/deposited (PECVD) SiNX layer topped by a thin atomic layer deposition/deposited (ALD) SiO2 film) using a two-step RIE procedure. READ MORE

  5. 5. Laminated HZO on InAs: A study of as-deposited ferroelectricity

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : André Andersen; [2022]
    Keywords : Ferroelectricity; HZO; InAs; III V; As-deposited ferroelectricity; BEOL; Nanoelectronics; Nanoprocessing; Nanotechnology; ALD; MOSCAP; Memory Technology; Technology and Engineering;

    Abstract : As the limits of transistor feature size scaling is reaching its saturation, new innovations are needed to prevent performance loss. High performance transistors on the III/V semiconductor platform implemented with ferroelectric oxides might in the future satisfy this demand. READ MORE