Essays about: "chloride-based CVD"

Found 2 essays containing the words chloride-based CVD.

1. 1. Quantum chemical studies of the chloride-based CVD process for Silicon Carbide

   University essay from Institutionen för fysik, kemi och biologi; Tekniska högskolan

   Author : Emil Kalered; [2012]
   Keywords : silicon; carbide; CVD; chloride; surface; chemistry; quantum; adsorption; transition; band gap; Emil; Kalered;

   Abstract : In this report the interaction between SiH2 molecules and a SiC-4H (0001) surface and SiCl2 molecules and a SiC-4H (0001) surface is investigated. This is done using a cluster model to represent the surface. First the clusters are investigated by calculating some properties to compare with experimental data to motivate the use of the cluster model. READ MORE

3. 2. SiC Homoepitaxial Growth at High Rate by Chloride-based CVD

   University essay from Linköpings universitet; Institutionen för fysik, kemi och biologi; Halvledarmaterial

   Author : Yuan-Chih Lin; [2010]
   Keywords : silicon carbide; chloride-based CVD; homoepitaxial growth; tungsten incorporation;

   Abstract : SiC is an attractive material since it has remarkable properties. For several years efforts have been put primarily in electronic applications. High power and high frequency devices can be fabricated on SiC due to its wide band gap, high breakdown field and high thermal conductivity. READ MORE