Essays about: "metal-insulator-metal MIM capacitors"

Found 1 essay containing the words metal-insulator-metal MIM capacitors.

  1. 1. Investigating and Fabricating High-K (Al2O3) and Ferroelectric (HfO2) MIM-Capacitors for use in BEOL Fabrication Applications

    University essay from KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Author : Thomas Hackett; [2021]
    Keywords : atomic layer deposition ALD ; ferroelectric; metal-insulator-metal MIM capacitors; low thermal budget; rapid thermal annealing RTA ;

    Abstract : Integration of high-K Metal-Insulator-Metal (MIM) capacitors in the Back-end-of-line (BEOL) is a topic of interest for the further development of the process at KTH Royal Institute of Technology. MIM-capacitors benefit from having constant capacitance values over a range of voltages and/or frequencies. READ MORE