Essays about: "sidewall passivation"

Found 2 essays containing the words sidewall passivation.

  1. 1. Process optimization of IR detectors based on In(Ga)Sb QDs in InAs matrix

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Mina Rajabi; [2012]
    Keywords : ;

    Abstract : This diploma project has been focused on optimization of the D2B IR detector fabrication process using different mesa sidewall treatments and passivation methods. X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscope (AFM) measurements have been carried out on samples treated by different wet etching methods, to analyze their surface chemical composition and roughness. READ MORE

  2. 2. Cryogenic Etching of the Electroplating Mold for Improved Zone Plate Lenses

    University essay from KTH/Tillämpad fysik

    Author : Daniel Larsson; [2010]
    Keywords : etching; plasma etching; zone plate; x-ray; nanofabrication; sidewall passivation; cryo; cryogenic; undercut;

    Abstract : The fabrication of zone plate lenses that are used for focusing X-rays relies on nanofabrication techniques such as e-beam lithography, reactive ion etching, and electroplating. The circular grating-like zone plate pattern can have a smallest half-period, a so-called zone width, of down to 20 nm while it also needs to have a height that is 5 to 10 times the zone width to have good diffraction efficiency. READ MORE