Surface Roughness Measurment: Multi-bandFrequency Shift Interferometer based onPolarization Measurement

Abstract: Optical measurement techniques have been gaining ground for their vast applications in industry and scientific purposes. These techniques are beneficial comparing to the mechanical methods. Non-intrusive, robust, high accuracy and small measurement volume are some of the advantages of the optical metrology. However, these approaches are expensive. Interferometry is one of the most prominent principles of these optical measurements. It employs the study of fringe patterns in order to model surface roughness with a high precision up to nano-meter scale. In this thesis, we mainly focus on the multi-band frequency shifting interferometry based on polarization measurement for 3D surface modeling. The system has advantages such as it is very accurate and there is no need of a phase unwrapping algorithm. Like the conventional phase shifting interferometry, four intensity images are recorded for the four polarization states correspondingly and then the images are processed by MATLAB and the final results are provided. In this technique the need for three cameras and offset correction between the cameras has been revised and optimized by using only one camera. In the first setup trial, a fiber optic switch has been used which does not lead to the desired results and then the switch has been removed and the corresponding images are satisfactory.