Fabrication and Characterization of Individually Addressable Polypyrrole Trilayer Microactuators
Conjugated polymers are organic polymers that can conduct electricity. They undergo a volume change upon redox reaction and can be used as an active material in some micro- actuator system. Micro-actuators are useful in biomedical and electronic application. We have fabricated a patterned Polypyrrole (PPy) trilayer microactuator device that has individually addressable microactuators (a micro walker) which can operate in air. Furthermore, the PPy trilayer microactuator device is fabricated using standard microfabrication method called photolithography to pattern PPy on PVDF membrane material. An etching process was used to achieve the patterning process. We presented the result of characterization of speed as a function of voltage and thickness of PPy film. Secondly, distance as a function of applied voltage and thirdly, the work density as a function of applied voltage. The procedures for fabrication of PPy microactuator device, using clean room facility is detailed in this thesis.
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