Micropumps for extreme pressures

Abstract: The objective of this thesis was to improve a paraffin actuated micropump design, to be able to pump against extreme pressures (above 100 bar). This was accomplished by initially studying the membrane activation, using video capturing. The micropump has been improved to withstand pressures high enough, to enable use in an high-performance liquid chromatography (HPLC) system. The micropump has been shown to pump against back pressures up to 150 bar, with a positive net-flow. This should be compared with the previously recorded maximum back pressure of 50 bar. The pumping against high back pressures was possible due to an increased understanding of the sealing of the membranes. This resulted in a new design that was manufactured and characterised. Without clamping the pump was measured to manage back pressures of 10 bar, and then starting to leak in a bond at the flow channel. With supporting clamping, the managed back pressures increased ten folded. When measured on the different valves, pressure above 200 bar has been possible to withhold. Although the valves were below their maximum limit, the pressure was not possible to be further increased due to a limitation in the equipment, i.e. risk of damaging the connections. When examined after pressurised at extreme pressures (above 100 bar) several times, no signs of fatigue or damage of the membrane was seen. A new behaviour of the valves was discovered. Above certain pressures some designs self sealed, i.e. withholding the pressure after the voltage was turned off. For these valves the pressure had to be released by some other means.