Essays about: "Chemical mechanical polishing"

Found 5 essays containing the words Chemical mechanical polishing.

  1. 1. Chemical Mechanical Polishing of InSb

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : David Linehan; [2021]
    Keywords : CMP; InSb; Chemical Mechanical Polishing; Indium; Antimonide; AFM; Profilometer; Ultrasonic; PVA; Smooth; Rough; Etch; Planarization; Technology and Engineering;

    Abstract : .... READ MORE

  3. 2. Evaluation of Chemical Mechanical Planarization Capability of Titan™ Wafer Carrier on Silicon Oxide

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Raul Molines Colomer; [2017]
    Keywords : ;

    Abstract : Chemical mechanical polishing (CMP) has emerged as a critical technique for the manufacture of complex integrated circuits to achieve low surface roughness and high degree of planarization. In particular, the continuous progression of the wafer carrier has been driven by the interest of diminishing the waste on a wafer by reducing the edge of exclusion area, and hence, increasing the amount of chips per wafer. READ MORE

  4. 3. Optimizing Transmission Kikuchi Diffraction for Analysing Grain Size and Orientation of Nanocrystalline Coatings

    University essay from Uppsala universitet/Tillämpad materialvetenskap

    Author : Axel Tryblom; [2015]
    Keywords : TKD; t-EBSD; Kikuchi diffraction; coating; nanocrystalline; sample preparation; in situ lift-out; DualBeam; precision mechanical polishing; SEM;

    Abstract : In order to increase efficiency and lifetime of cutting tools it is typical to apply thin coatings by physical or chemical vapour deposition. Applying coatings on cutting tools has shown an increase in both efficiency and lifetime and are of large interest in further development. READ MORE

  5. 4. InP/Si Template for Photonic Application

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Niklas Larsson; [2015]
    Keywords : CELOG; CMP; Chemlox; Citric Acid; Sodium Hypochlorite; InP; CELOG; CMP; Chemlox; Citronsyra; Natrium Hypoklorit; InP;

    Abstract : In this work an epitaxial layer of Indium Phosphide (InP) has been grown on top of a silicon substrate using the Corrugated Epitaxial Lateral Overgrowth (CELOG) technique. The grown InP CELOG top layer typically has a poor surface roughness and planarity. Before this surface can be used for any processing it has to be smooth and planarized. READ MORE

  6. 5. Surface Optimization of the Silicon Templates for Monolithic Photonics Integration

    University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Author : Chen Hu; [2011]
    Keywords : Chemical mechanical polishing; epitaxial lateral growth; surface optimization; roughness; surface morphology; step height; surface topography.;

    Abstract : Silicon photonics is emerging as a potential field to achieve optical interconnects towards the realization of ultra high bandwidth. The indirect band-gap property of silicon still remains as a big challenge to incorporate silicon photonic active device, for example, silicon-based laser. READ MORE