Fabrication and Characterization of Micro and Nano Scale SiC UV Photodetectors

Abstract: The focus of this master thesis work is on the fabrication of micro- and nano-scale metalsemiconductor-metal silicon carbide (SiC) UV photodetectors and subsequent electrical and optical evaluation of the fabricated devices. The UV photodetectors have significant potential to address the needs of many applications such as detection of corona discharge and flames, industrial machine viewing, and bacteria in water or paper mills. Micro-scale devices in 4H-SiC and 6H-SiC have been fabricated successfully with good photoresponse and low dark current. Reduction in size of the 4H-SiC UV detectors from micro-scale to nano-scale has been achieved by the use of nano imprint lithography (NIL). The performance of these nano-devices have been characterized, and experiment results reveal good photo sensitivity at very low applied biases.