ATLAS Inner Tracker Upgrade for HL-LHC: Silicon microstrip detector metrology

Abstract: The Large Hadron Collider (LHC) will be upgraded to the High-Luminosity LHC (HL-LHC) by the end of this decade, with five times larger luminosity and 200 inelastic collisions per proton-proton bunch crossing. Thus, the ATLAS detector is challenged to survive the stronger radiation and the increased particle flux. As a result, the new ATLAS Inner Tracker (ITk) will replace the current one with a new full-silicon detector. The new detector requires high precision during manufacturing. Thus, a metrology process is necessary, in which an optical zoom microscope with precise position measurement is used. A post-process program has been created to handle the measuring results. Validation and tests for this method for several types of the sensor have been done in this project in Lund, Uppsala and Copenhagen.