Essays about: "Albert Malmros"
Found 1 essay containing the words Albert Malmros.
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1. Investigation on the Optimization of GaN Etching for FinFET Applications
University essay from Lunds universitet/Institutionen för elektro- och informationsteknikAbstract : In the framework of this thesis, the optimization of the etching process of GaN for FinFET applications has been investigated. FinFETs are transistors with a vertical architecture in the shape of fins. These fins are fabricated by etching a pattern into a GaN substrate. The etching is carried out in two steps, a dry etch and a wet etch. READ MORE
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