Essays about: "Albert Malmros"

Found 1 essay containing the words Albert Malmros.

  1. 1. Investigation on the Optimization of GaN Etching for FinFET Applications

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : Albert Malmros; [2022]
    Keywords : Technology and Engineering;

    Abstract : In the framework of this thesis, the optimization of the etching process of GaN for FinFET applications has been investigated. FinFETs are transistors with a vertical architecture in the shape of fins. These fins are fabricated by etching a pattern into a GaN substrate. The etching is carried out in two steps, a dry etch and a wet etch. READ MORE