Essays about: "HfO2"

Showing result 11 - 12 of 12 essays containing the word HfO2.

  1. 11. Growth and characterization of HfON thin films with the crystal structures of HfO2

    University essay from Plasma och beläggningsfysik

    Author : Bo Lü; [2011]
    Keywords : hafnium dioxide; thin films; gate dielectric; nitrogen incorporation; dielectric constant; crystal structure; HIPIMS; magnetron sputtering;

    Abstract : HfO2 is a popular replacement for SiO2 in modern CMOS technology. It is used as the gate dielectric layer isolating the transistor channel from the gate. READ MORE

  3. 12. Wet etching of optical thin films

    University essay from JTH, Kemiteknik

    Author : Curt Edström; [2010]
    Keywords : Thin film; Wet etching; Optical coating; Physical vapour deposition;

    Abstract : Evaluation of the wet etching properties of several different thin film oxidesgrown by physical vapour deposition was performed in this work. MgO, Al2O3,SiO2, TiO2, HfO2 ZrO2 and Y2O3 were coated on two types of substrates; Si andborosilicate glass and etching tests were performed in different etchingsolutions. READ MORE