A process recipe for bonding a silicone membrane to a plastic substrate

University essay from Institutionen för teknikvetenskaper

Author: Linus Schönström; Anna Nordh; Anton Strignert; Frida Lemel

Keywords: bonding silicone; corona surface treater; SiO2 coating; thermoplastic substrate; PVD temperature; PDMS membrane; spin-coating; thickness measurements; microfluidic systems; bonding PDMS; silicon dioxide coating; spin-cast; silicone membrane; PDMS; polydimethylsiloxane; poly dimethylsiloxane ; silicon dioxide PVD; SiO2 PVD; silicon dioxide evaporation; SiO2 evaporation; thickness of a thin film; silicon dioxide deposition; SiO2 deposition; adhesion testing; cycloolefincopolymer; cycloolefinpolymer; cyclic olefin copolymer; cyclic olefin polymer; COC; COP; plasma surface treater; surface activator; surface oxidizer;

Abstract: A spin-cast silicone membrane has been successfully bonded between two injection-molded microstructured plastic discs. This sandwich structure creates a useful platform for mass production of microfluidic systems, provided that the bonds are leakproof. The bonds were achieved by a silicon dioxide coating deposited on the plastic discs by evaporation. This investigation is concerned with the process and the result only, no theory is discussed.

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