Optical components of XUV monochromator : For use in laser based angle-resolved photoemission spectroscopy

Abstract: At the division of Material Physics at KTH an angle resolved photoemission spectrometer (ARPES) is being built. This system uses a pulsed laser to create ultraviolet light through higher harmonic generation. The laser has a high output effect which puts the optical components of the system under a large heat load. This thesis investigates the use of silicon carbide (SiC) as a possible material for use in the system. A diffraction grating is modelled and then processed by use of photolithography and plasma etching. This is then characterized by different methods, finally in its working environment. It is concluded that silicon carbide is a plausible material for use in the ARPES system.