Essays about: "BEOL"

Found 2 essays containing the word BEOL.

  1. 1. Laminated HZO on InAs: A study of as-deposited ferroelectricity

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : André Andersen; [2022]
    Keywords : Ferroelectricity; HZO; InAs; III V; As-deposited ferroelectricity; BEOL; Nanoelectronics; Nanoprocessing; Nanotechnology; ALD; MOSCAP; Memory Technology; Technology and Engineering;

    Abstract : As the limits of transistor feature size scaling is reaching its saturation, new innovations are needed to prevent performance loss. High performance transistors on the III/V semiconductor platform implemented with ferroelectric oxides might in the future satisfy this demand. READ MORE

  3. 2. Investigating and Fabricating High-K (Al2O3) and Ferroelectric (HfO2) MIM-Capacitors for use in BEOL Fabrication Applications

    University essay from KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Author : Thomas Hackett; [2021]
    Keywords : atomic layer deposition ALD ; ferroelectric; metal-insulator-metal MIM capacitors; low thermal budget; rapid thermal annealing RTA ;

    Abstract : Integration of high-K Metal-Insulator-Metal (MIM) capacitors in the Back-end-of-line (BEOL) is a topic of interest for the further development of the process at KTH Royal Institute of Technology. MIM-capacitors benefit from having constant capacitance values over a range of voltages and/or frequencies. READ MORE