Essays about: "RIE lag"
Found 1 essay containing the words RIE lag.
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1. Design and Manufacturing of a Rotationally Symmetric Cold Gas Nozzle in Silicon
University essay from Ångström Space Technology Centre (ÅSTC)Abstract : In this master thesis, the goal was to devise design patterns and a fabrication processfor manufacturing a 3-D rotationally symmetric converging-diverging cold gasmicronozzle in silicon.The report explains the theory of etching and the methods involved. The work beginswith calculations and simulations of the etching processes. READ MORE
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