Essays about: "Thomas Joseph Grandsaert Jr"

Found 1 essay containing the words Thomas Joseph Grandsaert Jr.

  1. 1. Synchrotrons as a Source for Soft X-Ray Lithography

    University essay from Lunds universitet/Synkrotronljusfysik; Lunds universitet/Fysiska institutionen

    Author : Thomas Joseph Grandsaert Jr; [2021]
    Keywords : Physics and Astronomy;

    Abstract : To move to lower modes in extreme ultra-violet lithography (EUVL) technology (and keep up with Moore’s law), new sources of soft X-ray radiation must be developed. It is clear from previous studies that Free Electron Lasers (FELs) can easily meet the in-band power requirements at these lower wavelength modes, however detailed studies for insertion devices (undulators) as a soft X-ray lithography (SXL) source are due for a re-evaluation. READ MORE