Essays about: "Aein Shiri Babadi"

Found 1 essay containing the words Aein Shiri Babadi.

  1. 1. Optimization of High-k films on Si Substrate : fabrication and characterization

    University essay from Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysik

    Author : Aein Shiri Babadi; [2012]
    Keywords : metal oxide semiconductor capacitors; Technology and Engineering;

    Abstract : In the present diploma project work, metal oxide semiconductor capacitors were fabricated on Silicon substrate. The oxide layer was formed by atomic layer deposition of high permittivity materials, HfO2 and Al2O3. The high-k films were grown using 65 ALD cycles at various deposition temperatures. READ MORE