Essays about: "Piezo-elektiska pådrivare"

Found 1 essay containing the words Piezo-elektiska pådrivare.

  1. 1. Enhancing Sensing in Nanoscale: Investigation of Smart Nanomechanical Cantilever Array

    University essay from KTH/Skolan för kemi, bioteknologi och hälsa (CBH)

    Author : Hiruy Michael Weldegiorgish; [2022]
    Keywords : Cantilever; AFM; Biosensor; Piezoresistive sensor; Piezoelectric actuator; Kantilever; AFM; Biosensor; Piezo -resistorer; Piezo-elektiska pådrivare;

    Abstract : In this report, a novel smart nanocantilever with self-deflection sensor using embedded piezo-resistor and self-actuation using integrated piezo-electric actuator is proposed, designed and simulated to enable highly sensitive label free biosensor and ultra-short cantilever probe for AFM applications. The smart nanocantilever comprises of a triangular Si3N4 nanocantilever (10µm long, 400nm width and 100nm thickness) connected to a multi-layer support structure (Si3N4 (100nm)/PZT (100nm)) having n-type silicon piezo resistor (7µm long ,2µm width and 20nm thickness) embedded in the Si3N4 layer in both the support structure and nanocantilever. READ MORE