Essays about: "Johan Meszaros"

Found 1 essay containing the words Johan Meszaros.

  1. 1. Large area zone plate exposure by fixed beam moving stage lithography

    University essay from KTH/Biomedicinsk fysik och röntgenfysik

    Author : Johan Meszaros; [2011]
    Keywords : ;

    Abstract : In this diploma project the so-called fixed beam moving stage (FBMS) module in the Raith 150 electron beam lithography system has been evaluated for making large area zone plate exposures. The project goal, besides the evaluation of the module, has been to find an exposure recipe for exposing zone plates with diameter up to 500 μm. READ MORE