Essays about: "reactive sputtering."

Showing result 1 - 5 of 21 essays containing the words reactive sputtering..

  1. 1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Author : Yoana Ilarionova; [2023]
    Keywords : Physics and Astronomy;

    Abstract : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. READ MORE

  3. 2. Heteroepitaxial Growth of GaN Film on Si substrate by Magnetron Sputtering

    University essay from Linköpings universitet/Institutionen för fysik, kemi och biologi

    Author : Zahra Mohammadianrasnani; [2023]
    Keywords : GaN; Sputter epitaxy; Thin film;

    Abstract : In this study, the effect of AlN buffer layer structure and morphology on the GaN films deposited on Si (111) substrate by reactive DC magnetron sputtering have been studied. For structural and morphological characterization X-ray diffraction (XRD) and Scanning electron microscope (SEM) were used. READ MORE

  4. 3. Photocatalytic activity of titanium dioxide thin films deposited with high power impulse magnetron sputtering

    University essay from Uppsala universitet/Fasta tillståndets elektronik

    Author : Victor Eriksson; [2021]
    Keywords : Photocatalysis; Titanium dioxide; Thin film; HiPIMS; Sputtering; Stearic acid;

    Abstract : High power impulse magnetron sputtering has shown a lot of promise as a way of depositing photocatalytic thin films of titanium dioxide at low temperatures, however, the films deposited are often amorphous and display uncertain photocatalytic abilities. This thesis explores the deposition and characterization of photocatalytic thin films deposited with high power impulse magnetron sputtering. READ MORE

  5. 4. Multicomponent TiNbCrAl nitride films produced by DCMS and HiPIMS

    University essay from Linköpings universitet/Tunnfilmsfysik

    Author : Grzegorz Sadowski; [2021]
    Keywords : High entropy nitrides; thin film; HiPIMS; hardness;

    Abstract : High entropy alloys (HEAs) are made of at least five principal elements in near-equimolar proportions. The vast number of possible alloys and unconventional combinations of properties are the main benefits of HEAs. Ti, Nb, Cr, Al and N were chosen in order to create a hard, corrosion resistant coating with good thermal stability. READ MORE

  6. 5. Correlating Photoconductivity with Photochromism in Oxygen-containing Rare-earth Metal Hydride Thin Films

    University essay from Uppsala universitet/Materialfysik

    Author : Suraya Kazi; [2021]
    Keywords : Rare-earth metal hydride; Thin film synthesis; Thin film characterization; Optical properties; Electrical properties; Chemical composition; Photochromic materials; Photoconductivity;

    Abstract : Scientists have recently discovered simultaneous photoconductivity and photochromism (i.e., optical switching upon light exposure) of oxygen-containing rare-earth metal hydrides (REMHO). A deep understanding of these extraordinary optical and electrical properties can open the door to advanced technological uses such as smart windows. READ MORE