Growth and Characterization of CrB2/TiB2 Superlattices by Magnetron Sputtering

Abstract: In the present work, growth and structural characterization of CrB2/TiB2 superlattices on (0001) Al2O3 substrate is studied. The superlattices are grown using a direct current magnetron sputtering (DCMS) system with a base pressure of <9E-7 Torr. For structural characterization X-ray diffraction (XRD), X-ray reflectivity (XRR), transmission electron microscopy (TEM), selected area electron diffraction (SAED), energy dispersive X-ray spectroscopy (EDX), and scanning transmission electron microscopy (STEM) are used. Hardness is measured using nanoindentation technique. For growth of CrB2/TiB2 superlattices it is shown that the sputtering gas pressure of PAr= 4 mTorr, and substrate temperature of T= 600 °C are optimized parameters for growing well-structured superlattices with good interface quality. Superlattices with a layer thickness ratio of Γ= 0.43 (Γ= DTiB2/DCrB2+DTiB2) and a total thickness of 1 μm are deposited with different modulation periods Λ=1, 2, 6, 8, and 10 nm to see the layer-thickness affect on the quality of the structures. XRD and TEM results show that by increasing the modulation period, the quality of superlattices with smooth interfaces increases. The superlattices with modulation period Λ=8 nm is shown to be the best structure having coherent lattice and smooth interfaces up to ~20 periods. The STEM analysis shows that after about 20 periods, grains started to grow at slightly different orientations. A superlattice of TiB2/CrB2(having TiB2 as the first deposited layer) with modulation period Λ=8 nm shows an epitaxial growth of TiB2 on Al2O3 (0001) substrate, however, no big difference between the structure of TiB2/CrB2 and CrB2/TiB2 superlattices is seen. EDX maps and line profiles show that there is a diffusion of CrB2 into TiB2 layers which is a serious problem for obtaining sharp interfaces. STEM also shows that for a small modulation period of Λ=1 nm, there is a faint layered structure, whereas EDX, SAED and XRD indicates a homogenous textures Ti-Cr-B film in this sample. Finally, the hardness measurement shows a hardness value of 29-34 GPa for different modulation periods. The lowest hardness value is related to the sample with modulation period of Λ=1 nm with about 29 GPa, and the highest hardness is related to the sample with Λ=8 nm ith around 34 GPa.