Essays about: "metalorganic vapor phase epitaxy"
Found 1 essay containing the words metalorganic vapor phase epitaxy.
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1. Epitaxial growth and processing of high-aspect ratio InGaAs fins for advanced MOSFETs
University essay from Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysikAbstract : In this thesis, InGaAs fins with vertical sidewalls consisting of {110} facets were epitaxially grown on InP(111)B substrates using metalorganic vapor phase epitaxy. A lithography patterned hydrogen silsesquixane growth mask was used to promote the formation of vertical {110} facets during the growth. READ MORE
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