Essays about: "etching"

Showing result 6 - 10 of 79 essays containing the word etching.

  1. 6. BCP Lithography Defined Arrays of InAs NWs Grown Using MOVPE with Au Seeds

    University essay from Lunds universitet/Lunds Tekniska Högskola; Lunds universitet/Fasta tillståndets fysik

    Author : Björn Landeke-Wilsmark; [2022]
    Keywords : Physics and Astronomy;

    Abstract : In this report we outline a detailed process flow for a quick and inexpensive implementation of large dense arrays of InAs nanowires (NWs) grown in the reactive ion etching/etched (RIE) pores of a SiO2/SiNx mask on top of an InAs/Si(111) substrate. The self-assembled (hexagonally close-packed) pattern of poly(methyl-methacrylate) (PMMA) cylinders in a poly(styrene) (PS) matrix adopted by a linear diblock poly(styrene-block-methyl-methacrylate) P(S-b-MMA) block-copolymer (BCP) was transferred to the dielectric stack (consisting of a ≈10 nm plasma enhanced chemical vapour deposition/deposited (PECVD) SiNX layer topped by a thin atomic layer deposition/deposited (ALD) SiO2 film) using a two-step RIE procedure. READ MORE

  3. 7. Investigation on the Optimization of GaN Etching for FinFET Applications

    University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

    Author : Albert Malmros; [2022]
    Keywords : Technology and Engineering;

    Abstract : In the framework of this thesis, the optimization of the etching process of GaN for FinFET applications has been investigated. FinFETs are transistors with a vertical architecture in the shape of fins. These fins are fabricated by etching a pattern into a GaN substrate. The etching is carried out in two steps, a dry etch and a wet etch. READ MORE

  4. 8. Block copolymer-based hybrid nanomaterials for nanoimprint applications

    University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Lunds Tekniska Högskola

    Author : Philip Sellin; [2022]
    Keywords : Block copolymer; Sequential infiltration synthesis; Nanoimprint lithography; Reactive ion etching; Self-assembly; Thermal annealing; Solvent vapour annealing; Nanoprocessing; Nanofabrication; Antibacterial; Technology and Engineering;

    Abstract : In this Master’s thesis project, a block copolymer (BCP) film was used in combination with sequential infiltration synthesis and etching to manufacture a nanoimprint lithography stamp consisting of silicon. The BCP film was designed to contain perpendicularly aligned hexagonally placed cylinders, a pattern that will later be investigated for antibacterial properties after being transferred via nanoimprint lithography to a polymer film. READ MORE

  5. 9. Work function engineering for high temperature FD-SOI transistors

    University essay from KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Author : Chenxi Wang; [2021]
    Keywords : ;

    Abstract : Various applications require the MOSFETs that work at a high temperature which is ambient operating temperature higher than 125 ℃. However, the traditional bulk MOSFETs at high temperature suffers from high leakage currents and threshold voltage shift, thus the performance of the bulk MOSFETs is severely degraded. READ MORE

  6. 10. Life and fracture in very high cycle fatigue of a high strength steel

    University essay from Karlstads universitet/Institutionen för ingenjörsvetenskap och fysik (from 2013)

    Author : Daniel Karlsson; [2021]
    Keywords : Very high cycle fatigue; VHCF; Fractography; Fine granular area; FGA; High strength tool steel; Ultrasonic testing equipment;

    Abstract : Classical fatigue models teach that there is an intrinsic fatigue limit for steels, representing a level of stress that is too low for regular crack growth where every cyclic load propagates a fatigue crack through the material. Modern application with extreme lifetimes has shown that fatigue will still take place in steels with stress levels well below the expected fatigue limit. READ MORE