Essays about: "optical lithography"

Showing result 11 - 15 of 17 essays containing the words optical lithography.

1. 11. Development of Contacts for Vertical GaSb Nanowires using Transmission Line Measurements

   University essay from Lunds universitet/Institutionen för elektro- och informationsteknik

   Author : Denis Nadein; [2016]
   Keywords : III-V; GaSb; Nanowires; Processing; Characterization; TLM; Technology and Engineering;

   Abstract : A processing method is developed to characterize contacts for vertical nanowire structures. The process is based around optical lithography and an organic spacer material in order to facilitate an easily repeatable processing flow. Substrates with MOVPE grown GaSb nanowires are processed into sets of resistor devices. READ MORE

3. 12. Evaluation of Atomic Layer Etching Possibility at Lund Nano Lab

   University essay from Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Author : Md Sabbir Ahmed Khan; [2016]
   Keywords : Atomic Layer Etching; Nanoimprint lithography; Nanowires; Physics and Astronomy;

   Abstract : In modern electronics, device downscaling demands atomic precision control and Atomic Layer Etching (ALE) can provide this prime capability with minute device damage. ALE, also known as layer-by-layer etching, is a technique of removing atomically thin layers from the surface of materials in a controlled way. READ MORE

4. 13. Optical Properties of Silicon Nanopillar Arrays for Biosensing

   University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

   Author : Inese Krasovska; [2014]
   Keywords : ;

   Abstract : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. READ MORE

5. 14. Advanced processing of vertically aligned nanodevices

   University essay from Lunds universitet/Fysiska institutionen

   Author : Shantonu Biswas; [2013]
   Keywords : photoresist; S1800; photodetector; nanowire; metal contact; Technology and Engineering;

   Abstract : Lithography technique is highly dependent on the photoresist that is used for the processing of the nanodevices. S1800 series photoresist is probably the most used positive photoresist for UV-lithography process. READ MORE

6. 15. Fabrication and Characterization of Micro and Nano Scale SiC UV Photodetectors

   University essay from KTH/Skolan för informations- och kommunikationsteknik (ICT)

   Author : Ludwig Östlund; [2011]
   Keywords : ;

   Abstract : The focus of this master thesis work is on the fabrication of micro- and nano-scale metalsemiconductor-metal silicon carbide (SiC) UV photodetectors and subsequent electrical and optical evaluation of the fabricated devices. The UV photodetectors have significant potential to address the needs of many applications such as detection of corona discharge and flames, industrial machine viewing, and bacteria in water or paper mills. READ MORE